11

Suppressing methods of cracking on inter-metallic silicon oxide films

Year:
2011
Language:
english
File:
PDF, 1.14 MB
english, 2011
40

Recrystallization of LPCVD amorphous Si films using F+ implantation

Year:
1994
Language:
english
File:
PDF, 593 KB
english, 1994